| |
Conation # |
Model |
Manufacturer |
Wafer Size |
| |
31819 |
5100 |
KLA-Tencor |
|
| |
31820 |
Surfscan 6200 |
KLA-Tencor |
|
| |
31821 |
DPS Throttle Valve Kit Upgrade |
Applied Materials AMAT |
|
| specs >> |
31824 |
Spectra FX 100 |
KLA-Tencor |
8 or 12 inch |
| specs >> |
31825 |
2135 |
KLA-Tencor |
8 inch |
| specs >> |
31827 |
2139 SMIF |
KLA-Tencor |
|
| specs >> |
31830 |
6220 |
KLA-Tencor |
2 inch to 8 inch |
| specs >> |
31831 |
UV-1250E |
KLA-Tencor |
4 to 8 inch |
| specs >> |
31832 |
CDE-80NH |
Shibaura-Shibatec |
8 inch |
| specs >> |
31833 |
ECO 3000 |
Nicolet |
8 or 12 inch |
| specs >> |
31835 |
QUANTOX 64100 |
KLA-Tencor |
8 inch |
| specs >> |
31837 |
2367 UV Lamp House 0122396-003 |
KLA-Tencor |
|
| specs >> |
31838 |
IDE Isolation Table CTC-1 Controller 3000187000 (KLA P/N 750-480037-005) |
KLA-Tencor |
|
| specs >> |
31839 |
300mm Y-Stage 23xx Kit 0098665-009 |
KLA-Tencor |
|
| specs >> |
31841 |
ALPHA 8SE-E |
Tokyo Electron TEL |
8 inch |
| specs >> |
32212 |
Stage Assy Spectra FX 100 – P/N 52- 0992 |
KLA |
|
| specs >> |
32213 |
Stage Assy Spectra FX 100 – P/N 52- 0992 |
KLA |
|
| specs >> |
32214 |
Back Side Inspection Module for SP1 DLS |
KLA-Tencor |
8 or 12 inch |
| specs >> |
32549 |
2139 Open Cassette |
KLA-Tencor |
|
