Equipment Details
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Conation#
30004
Model
FCE-4000
Manufacturer
Temescal
Year
Wafer Size
Configuration
E-Beam Evaporator, with 3' X 3' X 3' Chamber, CV-14 P/S, 4 Pocket E-Gun, Ion Tech Ion Gun, PLC Controller, Inficon IC5 Deposition Controller, Substrate Heat, MFC Gas System
