Manufacturer

KLA-Tencor

Model

2915

Wafer Size

300 mm

Conation Id

670

Configuration

KLA - Tencor 2915

Part Number: 0299589-000

Description:

Model 2900
Serial number Available with NDA

Configuration:

Standard Ducting
DFIHS Phoenix v2.0 VQ
Line Cond. 45kVA
25 Cassette HH, 300mm SW
300mm: DSH 065, Haze, Shiny
2915
IDA Rack
E84 Error Recovery Suite
Dual E84 RGV & OHT, PHX, DFIK, SHHKO
E87/E39 and E90
K40/K94
GEM/SECS and HSHS
2 Onron VG40 V3 CID, PHX SHHKO
Safety Skirt, DFIHS, PHX
OHT, E-Stop and Lockout, DF, PHX
Dual Loadport Info Pad Kit
G4 FIHS Ionization
Remote Blower Conversion Kit
50ft Blower Cable, 290X/1X
20m Main Power Cable 290X/1X
Small Pixel 29xx
65 ft EHO Fac PNL to LC Cables
OPT. SIG THR, PHX RYGB

Logic and Memory Inspection Modes

Optics available
0.05, 0.065, 0.08, 0.09, 0.12, 0.16, 0.2, 0.22

Exposure modes
Blue Band
Broad Band UV
Deep Band UV
Midle Band UV
Ultra Broad Band
Ultra Deep Band
GH I Line
G Line
HI Line
I Line
VIS

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